![]() ![]() Microsystem Design Senturia Solution Software Used In It is appropriate for textbook use by seniorgraduate courses in MEMS, and will be a useful reference for the active MEMS professional. ![]() This book is used for a graduate course in Design and Fabrication of Microelectromechanical Devices (MEMS) at the Massachusetts Institute of Technology. The Case Study subjects are: the design and packaging of a piezoresistive pressure sensor, a capacitively-sensed accelerometer, a quartz piezoelectrically-driven and sensed rate gyroscope, two electrostatically-actuated optical projection displays, two microsystems for the amplification of DNA, and a catalytic sensor for combustible gases. Microsystem Design Senturia Solution Software Used In. ![]()
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